ＳＯＩ结构中隐埋介质层的离子合成＝－１９９４，２３（６）．－３～１２从八十年代中期起，ＳＯＩ结构隐埋介质层离子合成技术就引起了研究界的广泛注意，虽然离子合成化合物本身早已为人们熟知，但真正认识到它在形成ＳＯＩ结构方面的前景则是在微电子技术发展和离子注... Ion synthesis of buried dielectric layer in SOI structure = -1994,23 (6). Since the mid-1980s, the technique of ion implantation of buried dielectric layers in SOI structures has drawn much attention in the research community. Although the ion-synthesized compounds are well known for themselves, they have truly realized that they are important in the formation of SOI structures Prospects are in the development of microelectronics and ion ...