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基因芯片是运用微电子加工技术以及基因分子的自组装技术在微小芯片上组装成千上万个不同的 ＤＮＡ微阵列，实现以基因为主的生命信息的大规模检测。本文利用氧化、光刻、蒸发、溅射等一系列集成电路刻蚀技术，研究了适于电化学检测的基因芯片微阵列的制备，并提出了这种芯片中微流路的制备工艺方案。
Gene chip is the use of microelectronics processing technology and gene chip self-assembly technology in the tiny chip assembled on thousands of different DNA microarrays, to achieve gene-based large-scale detection of life information. In this paper, a series of integrated circuit etching techniques, such as oxidation, photolithography, evaporation and sputtering, were used to study the preparation of microarray for electrochemical detection. The preparation of microchannels in this chip was also proposed.