文中对压力传感器中用扩散法和离子注入法制作的电阻的温度系数进行了研究。实验结果表明，同扩散法制备的电阻相比，采用离子注入法制备的电阻，其温度系数更小，且阻值能够精确控制 In this paper, the temperature coefficient of the resistance made by the diffusion method and the ion implantation method is researched in the pressure sensor. The experimental results show that, compared with the resistance prepared by the diffusion method, the resistance prepared by the ion implantation method has a smaller temperature coefficient and the resistance value can be precisely controlled