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本专利提供一种表面特性干涉测量装置。该装置的工作方式是这样的:一分束器(26)将一束相干光束分裂成两束线偏振分光束,这两束分光束的偏振方向是垂直的,它们各自均被聚焦在被检测表面的一个点上(34)。经反射后,它们被照射在光电传感器(36)上。光电传感器提供的两束分光束之间的相位差便可以用来评价表面特性。
This patent provides a surface feature interferometry device. The operation of the device is such that a beam splitter (26) splits a beam of coherent light into two linearly polarized sub-beams whose polarization directions are vertical and each of which is focused on the side One point on the surface (34). After reflection, they are illuminated on the photosensor (36). The phase difference between the two beam sub-beams provided by the photoelectric sensor can be used to evaluate the surface properties.