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用分析电镜和高分辨电镜对在３０ｍｍ×３０ｍｍＬａＡｌＯ３衬底上，采用中空柱状阴极直流磁控溅射的高ＪｃＹＢａ２Ｃｕ３Ｏ７－ｘ（ＹＢＣＯ）薄膜的微观组织结构进行了研究。薄膜为ｃ轴取向ＹＢＣＯ，含有少量Ｙ２ＢａＣｕＯ５颗粒和纺锤状Ｙ２Ｏ３。膜内主要晶体缺陷为［００１］刃位错和螺位错、堆垛层错、（００１）晶面弯曲带、小于１５ｎｍ的晶格畸变区和阳离子空位。ＬａＡｌＯ３衬底表面呈阶梯状并有小坑。衬底表面第一层膜原子为ＣｕＯ和ＣｕＯ２层，以致在界面形成ＢａＣｕＯ２和ＹａＢａＣｕ２Ｏ５相。ＬａＡｌＯ３衬底表层有较多位错，对薄膜外延生长和缺陷的形成有明显影响。
The microstructures of high JcYBa2Cu3O7-x (YBCO) thin films with a hollow cylindrical DC magnetron sputtering on a 30mm × 30mm LaAlO3 substrate were investigated by SEM and high resolution electron microscopy. The film is c-axis oriented YBCO with a small amount of Y2BaCuO5 particles and spindle Y2O3. The main crystal defects in the film are [001] edge dislocation and screw dislocation, stacking faults, (001) plane bending band, lattice distortion region less than 15 nm and cationic vacancies. The surface of LaAlO3 substrate is stepped and has pits. The first layer of film atoms on the surface of the substrate is CuO and CuO2 layers, so that BaCuO2 and YaBaCu2O5 phases are formed at the interface. LaAlO3 substrate surface more dislocations, the film epitaxial growth and defects have a significant impact on the formation.