感应耦合高频等离子体(ICP)最初是Reed于1961年开始研究的,他在研究大气压力下维持电离气体(等离子体)的新方法时,根据感应加热的原理使等离子体感应产生高频涡流。1964年Greenfield等把等离子体作为激发光源首先应用于发射光谱分析。不久Wendt和Fassel也报道了他们的研究情况。高频等离子体光源的出现,由于它具有无可比拟的优点,使发射光谱的发展获得了新生,被广泛应用于化工、地质、冶金、材料以及环保分析中。 Inductively Coupled High Frequency Plasma (ICP) was originally developed by Reed in 1961. When he studied a new method of maintaining ionized gas (plasma) at atmospheric pressure, the plasma induced high frequency eddy currents . In 1964, Greenfield et al. First used plasma as the excitation light source for emission spectroscopy. Soon Wendt and Fassel also reported their research. The emergence of high-frequency plasma source, due to its incomparable advantages, the development of the emission spectrum has been reborn, is widely used in chemical, geology, metallurgy, materials and environmental analysis.