一、前言过去,用谐振式传感器测定压力,主要有两种方法,一种是利用膜盒等受压元件来承受压力而变换为力,把这种力加在谐振的金属丝或谐振梁上,根据其谐振频率的变化量而测定压力的间接测定法;另一种是把压力加在谐振的簿膜或簿壁圆筒壳体上,根据其谐振频率的变化量而测定压力的直接测定法。前法在受压元 I. Preface In the past, there are two main methods for measuring pressure with a resonant sensor. One is to use a pressure-sensitive element such as a bellows to withstand pressure and transform it into a force. Apply this force to the resonant wire or resonant beam , An indirect measurement method for measuring the pressure based on the change in the resonance frequency thereof, and the other is the direct measurement of the pressure measured by applying the pressure to a resonant membrane or a thin-walled cylindrical case on the basis of the change in the resonance frequency law. The former method is under pressure