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考虑到谐振微梁振动时，撞击在微梁两侧的分子数目和分子速率分布的差异，对Ｋａｄａｒ等人提出的撞击微梁的分子速率分布函数做了修正．利用修正后的模型，对真空中运动微梁的品质因数进行了理论分析．结果表明，修正后的理论值比原理论值与实验值符合得更好，对于谐振微梁结构参数的优化设计具有一定的指导意义．同时，在高真空区域，考虑了谐振微梁本征阻尼与分子碰撞耦合效应，消除了原有处理方法在该区域出现的折点．
Taking into account the difference between the number of molecules impacted on both sides of the microbeam and the molecular velocity distribution when the resonant microbeam vibrates, the molecular velocity distribution function of the impinging microbeam proposed by Kadar et al. Is modified. Using the modified model, the quality factor of moving microbeam in vacuum is analyzed theoretically. The results show that the corrected theoretical value is better than the original theoretical value and the experimental value, which is of guiding significance for the optimization design of structural parameters of resonant micro-beam. In the meantime, in the high vacuum region, the coupling effect of the intrinsic damping and the molecular collision of the resonant microbeam is considered, and the turning point of the original processing method in this region is eliminated.