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针对有机无机杂化的电光材料设计了单模加载条形的波导结构,模拟了这种结构中光场的分布,制作了直波导,测得其传输损耗为2.0 dB/cm;采用这种加载条形的波导结构设计了马赫-曾德尔干涉型(MZI)电光调制器,通过对MZI结构互作用区的优化选择,互作用区两波导间距为30μm,长度为15000μm;通过分析共面波导型行波电极的中心电极宽度及中心电极与地电极间距对特性阻抗、重叠积分因子以及半波电压的影响,得出中心电极宽度9μm,中心电极与地电极间距5μm时,器件半波电压最低,为8.4 V。器件制作完成后对其进行测试得出了线性调制曲线,并测得半波电压为9.0 V,与理论值基本符合。
A single-mode bar-loading waveguide structure was designed for the electro-optic material of organic-inorganic hybrid. The distribution of the light field in this structure was simulated and a straight waveguide was fabricated. The measured transmission loss was 2.0 dB / cm. The MZI electro-optic modulator with bar waveguide structure is designed. Through optimizing the interaction area of MZI structure, the distance between two waveguides in the interaction area is 30μm and the length is 15000μm. By analyzing the characteristics of the coplanar waveguide The width of central electrode of traveling wave electrode and the influence of distance between center electrode and ground electrode on the characteristic impedance, overlapping integral factor and half-wave voltage show that the width of central electrode is 9μm, the voltage of half-wave is the lowest when the distance between center electrode and ground electrode is 5μm, 8.4 V. After the device was fabricated, it was tested to obtain a linear modulation curve, and the half-wave voltage was measured to be 9.0 V, basically in line with the theoretical value.