论文部分内容阅读
文中讨论了影响非制冷微测辐射热计的主要因素 ,介绍了器件中结构设计和材料的选取 ,给出了工艺过程和器件的测试结果
In this paper, the main factors affecting uncooled microbolometer are discussed, the structure design and material selection are introduced, the process and device test results are given