一、研制目的及国内外情况简介 机械增压泵是一种中真空获得设备。由于它具有启动迅速,运转平稳,振动与噪音较小和在10-1～10-2托范围内具有较大的抽速等特点。因此它在国内外都获得了飞速的发展。 目前国内生产的机械增压泵产品规格有: 150升/秒、 600升/秒、 1200升/秒、2500 First, the purpose of research and domestic and foreign briefings Mechanical booster pump is a medium-vacuum access to equipment. Because of its fast start, smooth operation, vibration and noise smaller and 10-1 ~ 10-2 Torr range with a larger pumping speed and so on. So it has achieved rapid development both at home and abroad. At present domestic production of mechanical booster pump product specifications are: 150 liters / second, 600 liters / second, 1200 liters / second, 2500