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TiO 2 powder, TiO 2/SiO 2 coated particle, and thin film reactor were prepared by sol gel process. Their morphology and structure were characterized by SEM, XRD and IR. Their effects of photocatalytic degradation for dichlorvos were studied. The Photocatalytic reactivity of thin film TiO 2 are better than that of powder TiO 2.