半导体集成电路集成度对超纯水水质的要求如下表:超纯水制备主要流程:原水→水槽→快速搅拌→慢速搅拌→沉淀槽→多层过滤→水槽→加酸系统(PH值=5)→脱氧器→加热器→过滤器→RO(反渗透)→水槽→混合床→过滤器→纯水槽→紫外杀菌→非再生磨光器→微过滤→超滤→成品水.一系列的预处理措施,对于延长使用寿命,减少清洗次数都起到了不可忽视的作用,从而维持了RO的日产水量和脱盐率.脱盐率 Semiconductor integrated circuit integration of ultrapure water quality requirements are as follows: Ultrapure water preparation The main process: raw water → Sink → rapid mixing → slow mixing → sedimentation tank → multi-layer filter → sink → acid system (PH = 5 ) → deaerator → heater → filter → RO (reverse osmosis) → sink → mixing bed → filter → pure water tank → UV disinfection → non-regenerating polisher → microfiltration → ultrafiltration → product water A series of pre-treatment Measures to prolong the service life, reduce the number of cleaning have played a non-negligible role, so as to maintain the RO daily water production and desalination rate.