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利用分子自组装技术,在单晶硅表面制备了稀土复合纳米自组装膜.运用原子力显微镜(AFM)观察了薄膜的表面形貌,使用X射线光电子能谱仪(XPS)分析了薄膜表面典型元素的化学状态,并运用静-动摩擦系数测定仪评价了薄膜的摩擦磨损性能.研究结果表明:通过硅烷偶联剂3-巯丙基三甲氧基硅烷(MPTS)的磺酸基化学吸附功能,稀土元素可以成功组装到氧化后的硅烷化表面.当组装稀土复合膜后,基片表面的摩擦系数由无膜时的0.8降到了0.08,表明复合膜可以降低基片的摩擦系数,并且在较低载荷下具有较好的耐磨性能.
The molecular self-assembly technique was used to fabricate nano-sized self-assembled monolayers of rare earth elements on the surface of monocrystalline silicon. The surface morphology of the films was observed by atomic force microscopy (AFM), and the typical elements on the surface of the films were analyzed by X-ray photoelectron spectroscopy The friction and wear properties of the films were evaluated by static-dynamic friction coefficient tester.The results show that the silane coupling agent 3-mercaptopropyltrimethoxysilane (MPTS) Element can be successfully assembled into the oxidized silanized surface.When the rare earth composite film is assembled, the friction coefficient of the substrate surface decreases from 0.8 to 0.08 when no film is formed, which indicates that the composite film can reduce the coefficient of friction of the substrate, Under load has good wear resistance.