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Interdiffusion in the diffusion couples of metallic multilayers is investigated for the variation of mobility and different initial phase separation (IPS) states.A phase field simulation shows that the diffusion flux and interface movement increase for higher atomic mobility.The shorter IPS time influences the diffusion flux of two-phase diffusion couples,and has almost no influence on the interface movement.Metallic multilayers have an important use in the interconnection of integrated circuit devices and packaging structures.With high device service temperature,element interdiffusion takes place through the interface of the multilayer alloys,which induces composition redistribution and interface movement,and thus affects the mechanical and electrical properties of the device.