最近,化学气相沉积技术作为表面硬化法既引人注目,且已迅速得到应用。目前,日本为提高各种工具和机械零件的耐磨和耐热,同时为增强耐蚀和改善装潢,广泛应用了化学气相沉积技术,在延长处理件的寿命和提高质量方面取得了成效。本文对超硬化合物涂膜的单层或多层涂 Recently, chemical vapor deposition technology has attracted attention as a surface hardening method and has been rapidly applied. At present, Japan has made extensive use of chemical vapor deposition (CVD) technology to increase wear resistance and heat resistance of various tools and machine parts, and to enhance corrosion resistance and decoration, and has achieved results in extending the service life and quality of treated parts. This article on the super-hard compound coating single-layer or multi-layer coating