论文部分内容阅读
采用各种实验技术的综合方法,发现了双极集成电路中的闭锁通道。用电压衬度扫描电子显微技术作为分析闭锁通道的内部探测。从6种器件上获得的数据表明,各种不同的通道组合和相互作用是造成闭锁的原因。
Using a comprehensive methodology of various experimental techniques, a blocking channel in bipolar integrated circuits was discovered. Voltage contrast scanning electron microscopy was used as the internal probe to analyze the blocking channel. The data obtained from the six devices shows that the various combinations and interactions of channels are the cause of latchup.