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分别采用波长为532nm的短脉冲激光(脉宽6ns)和超短脉冲激光(脉宽15~20ps)对蓝宝石进行基本作用规律的研究,探究了多/单脉冲烧蚀点直径与功率的关系,分析脉冲数与材料阈值的关系,确定材料阈值。并且对相关作用机理进行系统的对比分析。研究结果表明,烧蚀点直径的平方与脉冲峰值功率的对数呈线性关系,根据关系式计算得出光斑半径与实际测量值相符,并且材料阈值随脉冲数的增加而降低。纳秒绿激光烧蚀蓝宝石材料主要是基于光热作用的机理,而皮秒激光烧蚀蓝宝石材料在以“电子态”冷去除的同时,还兼具一些非线性效应。
The basic law of sapphire was investigated by using short pulse laser with a wavelength of 532nm (pulse width 6ns) and ultrashort pulse laser (pulse width 15 ~ 20ps) respectively. The relationship between the diameter of multi / single pulse ablation point and power was studied, The relationship between the number of pulses and the material threshold is analyzed to determine the material threshold. And the relative mechanism of the mechanism of comparative analysis. The results show that the square of the ablation point has a linear relationship with the logarithm of the pulse peak power. According to the relational formula, the spot radius is consistent with the actual measured value, and the material threshold decreases with the increase of the pulse number. Nanosecond laser ablation of sapphire material is based on the photothermal mechanism, and picosecond laser ablation of sapphire material in the “electronic state” cold removal at the same time, it also has some non-linear effects.