用溶胶－凝胶法合成了结构均匀而无裂纹的ＮｉＯ薄膜．借助Ｘ射线衍射仪和光学显微镜等手段，对ＮｉＯ薄的晶体结构和形貌进行了分析；利用光干涉仪测定了薄膜的厚度．讨论了浸沉涂布时垂直引上速度对薄膜厚度和成膜性的影响．为了制备结构均匀而无裂纹的ＮｉＯ薄膜，引上速度不应超过１２ｃｍ／ｍｉｎ． NiO thin films with uniform structure and no cracks were synthesized by sol - gel method. The crystal structure and morphology of NiO thin films were analyzed by means of X-ray diffraction and optical microscope. The thickness of thin films was measured by optical interferometer. The effect of vertical pull-in speed on film thickness and film-forming properties was discussed. In order to prepare a uniform and crack-free NiO film, the pull-up speed should not exceed 12 cm / min.