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原子力显微镜已成为人们观测和研究物体微观世界的强有力的工具.由悬臂梁与探针集成的力传感器是原子力显微镜的一个关键部件,而固有频率是其一个主要技术参数.本文介绍了一种采用光学象散原理测试原子力显微镜的力传感器固有频率测试系统的原理、组成和测试方法.
AFM has become a powerful tool for people to observe and study the microscopic world of objects.The force sensor integrated with cantilever and probe is a key component of AFM, and its natural frequency is one of its main technical parameters.This paper introduces a method using Principle of optical astigmatism principle test atomic force microscope natural force sensor system, composition and test methods.