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一、常规型质谱检漏仪的发展真空检漏技术中,唯有氦质谱检漏仪灵敏度最高。广泛采用,发展较快亦较成熟。早在四十年代其检漏灵敏度为10~(-8)托·升/秒,到五十年代末达10~(-13)～10~(-14)托·升/秒。国内在六十年代以来分别研制的氦质谱检漏仪以及国外绝大部分质谱检漏仪新产品均属常规形式(见附表1、表2)。被检漏件与节流阀相连,由辅助机械泵完成粗抽。检漏时节流阀徐徐打开,调至质谱室允许的工作压强,质谱室真空由扩散泵抽气。为提高系统的真空度和质谱室少受沾污,一般加有液氮冷阱,前级有机械真空泵以及必要的一些辅助的旁路或
First, the development of conventional mass spectrometry leak detector Vacuum leak detection technology, the only helium mass spectrometer leak detector sensitivity. Widely used, developed faster and more mature. As early as the 1940s, its leak detection sensitivity was 10 -8 Torr · L / s and reached 10-13 (-10) (-14) Torr · L / s by the late 1950’s. The domestic helium mass spectrometer leak detectors developed since the 1960s and the vast majority of new mass spectrometer leak detectors abroad are conventional forms (see Table 1 and Table 2). Leakage was detected with the throttle connected by the auxiliary mechanical pump to complete the rough pumping. Leakage slowly open the throttle valve, transferred to the working pressure allowed by the mass spectrometer chamber, the mass spectrometer vacuum pump by the diffusion pump. In order to improve the system vacuum and the mass spectrometer chamber less contaminated, the general plus liquid nitrogen cold trap, the former mechanical vacuum pump and the necessary number of auxiliary bypass or