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我们为超精密测量系统开发了一种新型主动隔振系统。它由三套三维激光干涉仪传感器及六组压电位移执行器组成，以限制空间运动的六个自由度。实现实时补偿振动的功能。该主动隔振系统能够有效地消除低频区振动，如与被动隔振系统组合，其隔振效果甚佳。
We developed a new active vibration isolation system for ultra-precision measurement systems. It consists of three sets of three-dimensional laser interferometer sensors and six piezoelectric displacement actuators to limit the spatial movement of the six degrees of freedom. Real-time compensation for vibration function. The active vibration isolation system can effectively eliminate low-frequency vibration, such as passive vibration isolation system combination, the vibration isolation effect is very good.