半导体器件是近几十年发展起来的一种新型电子器件,它体积小、重量轻、功耗低、可靠性高,在电子学领域中已占有相当重要的地位,尤其是在导弹、计算机和航天技术中更显得重要。而集成电路是近十几年在平面型晶体管基础上发展起来的。目前由于在半导体器件和集成电路的研制和生产过程中,手工操作仍很多,以及使用数量的迅速增加,故提高可靠性已成为重要的问题。为了保证设备和系统功能正常,必须评价和验证半导体器件和集成电路的可靠性,以供系统设计者的参考,还要通过适当的手段测定其功能极限和对失效进行分析,找出性能退化的原因,改进工艺和向使用者提出合理 Semiconductor device is a new type of electronic device developed in recent decades. It has small size, light weight, low power consumption and high reliability. It occupies a very important position in the field of electronics, especially in the fields of missiles, computers and Aerospace technology is even more important. The integrated circuit is nearly ten years in the planar transistor based on the development. At present, due to the large number of manual operations in the development and production of semiconductor devices and integrated circuits, and the rapid increase in the number of used devices, it has become an important issue to improve the reliability. In order to ensure the proper functioning of equipment and systems, the reliability of semiconductor devices and integrated circuits must be evaluated and verified for use by system designers. The limits of functionality must also be determined by appropriate means and analyzed for failure to identify degraded Reason, improve the process and made to the user reasonable