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用国产MBE设备生长出与InP衬底晶格匹配的InGaAs/InAlAs多量子阱材料,并对材料的量子限制Stark效应及其与光偏振方向有关的各向异性电吸收特性进行研究.用该种材料制作的脊波导结构电吸收调制器在2.4V驱动电压下实现了20dB以上消光比,光3dB带宽达3GHz
InGaAs / InAlAs MQWs lattice matched with InP substrate were grown by domestic MBE devices. The Stark effect of quantum confinement and the anisotropic absorption of the materials were investigated. The ridge waveguide structure electroabsorption modulator fabricated with this kind of material achieves an extinction ratio of more than 20 dB at a drive voltage of 2.4 V and a 3dB bandwidth of light up to 3 GHz