在真空等离子沉积中 ,首先要触发真空电弧 ,由于等离子沉积本身所具有的复杂性 ,要成功地触发真空电弧必须考虑很多因素 ,如 :阴极的材料、电极的结构、阴阳两电极之间的间隙、电极的表面状态、触发方式等。文中对影响触发电弧的因素以及在设计触发电路时需要考虑的因素作了一定的分析 ,并在此基础上 ,提出了一个实用可靠的触发电路 In vacuum plasma deposition, the vacuum arc must be triggered first. Due to the complexity of plasma deposition itself, many factors must be considered in order to successfully trigger the vacuum arc, such as the material of the cathode, the structure of the electrode, the gap between the anode and the cathode The surface state of the electrode, the triggering method, and the like. In this paper, the factors affecting the triggering arc and the factors to be considered when designing the triggering circuit are analyzed. Based on this, a practical and reliable triggering circuit