差容式加速度计具有可量测零赫的加速度值,能在惡劣环境下工作,体积小、重量轻、灵敏度高、后续仪器简单等特点,是一种用途广泛的新颖加速度计。本文对差容式加速度计的工作原理和误差来源进行了比较详细的分析和讨论,为设计制造此种加速度计提供了理论依据。文中还介绍了我们所研制的CYJ-1型加速度计的实际性能。 Differential capacitive accelerometer with measurable zero-hertz acceleration value, can work in harsh environments, small size, light weight, high sensitivity, follow-up instrument is simple and so on, is a widely used novel accelerometer. In this paper, the working principle and error sources of differential capacitive accelerometer are analyzed and discussed in detail, which provides a theoretical basis for designing and manufacturing such accelerometer. The article also describes the actual performance of the CYJ-1 accelerometer we have developed.