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为了解决传感器的数字化,提出了一种新的数字加速度传感器。它是由两个环形振荡器和一个混频器组成的频率输出型加速度传感器,其敏感元件是做在硅梁上的MOS环形振荡器。该传感器具有准数字输出、灵敏度高、温度系数低以及制作工艺简单等特点,其灵敏度可达到6.91kHz/g。分析了环形振荡器的频率特性,以及环形振荡器谐振频率和加速度的关系,设计并分析了加速度传感器的电路及物理结构,最后给出了试验结果。这种加速度传感器在军事和民用领域有广阔的应用前景。
In order to solve the digitization of the sensor, a new digital accelerometer is proposed. It is a frequency output type accelerometer composed of two ring oscillators and a mixer. Its sensing element is a MOS ring oscillator made on a silicon beam. The sensor has a quasi-digital output, high sensitivity, low temperature coefficient and the production process is simple and other characteristics, the sensitivity can reach 6.91kHz / g. The frequency characteristics of the ring oscillator and the relationship between the resonance frequency and the acceleration of the ring oscillator are analyzed. The circuit and the physical structure of the acceleration sensor are designed and analyzed. Finally, the experimental results are given. This acceleration sensor has broad application prospects in military and civil fields.