用金属有机物分解法制备了钛酸铅薄膜。研究了成膜的技术条件。一次甩胶可以获得厚约0.1μm均匀、无开裂、无针孔的薄膜,较厚的膜可通过多次甩胶得到。X射线衍射证实,经700℃热处理后,膜呈现四方钙钛矿的单相结构。Rutherford背散射表明,即使在多次甩胶制得的膜中,组份的厚度分布也是均匀的。 Lead metal titanate films were prepared by metal organic decomposition method. The technical conditions of film formation were studied. A rejection of plastic can be obtained about 0.1μm thick uniform, no cracking, no pinhole film, thick film can be obtained by multiple plastic rejection. X - ray diffraction confirmed that after heat treatment at 700 ℃, the film showed a tetragonal perovskite single phase structure. Rutherford backscattering shows that the thickness distribution of the components is even, even in films that have been drained multiple times.