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根据傅里叶变换轮廓法的测量原理,提出对大型三维曲面轮廓测量进行光栅频率和横坐标修正的方法和必要性,并进行了实验验证,所得数据的引用误差由修正前的大于0.7%降低到0.3%以内。
According to the measurement principle of Fourier transform profile method, the method and necessity of grating frequency and abscissa correction for large three-dimensional surface profile measurement are proposed and verified by experiments. The reference error of the obtained data is reduced by more than 0.7% before correction To 0.3% or less.