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概括国内外可靠性课程与可靠性专业的整体布局和设置状况。简要介绍《微电子器件可靠性》课程的特点,分析《微电子器件可靠性》课程中的核心模块和有机联系。以企业中通用型CMOS晶体管的生产制作为例,以生产过程中注入工艺参数Dvt、DNF、DP执行、成品的阈值电压电参数Vtn、Vtp测试等进行体验式教学,将核心模块中数学、半导体物理、芯片制造、管理等串联起来,构建了《微电子器件可靠性》课程中工艺案例的运用与实践。
Summarize the overall layout and setting of reliability courses and reliability at home and abroad. Briefly introduce the characteristics of “Microelectronic Device Reliability” course and analyze the core modules and organic connections in the course of “Microelectronic Device Reliability”. Taking the production of a general-purpose CMOS transistor in an enterprise as an example, an experiential teaching is performed with the process parameters Dvt, DNF and DP injected into the manufacturing process, the threshold voltage and electrical parameters Vtn and Vtp tests of the finished product, and the mathematics and semiconductors Physics, chip manufacturing, management and other series together to build the course of “microelectronic device reliability” case of the use of technology and practice.