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采用等离子体化学聚合,在氧化硅层表面聚合单层甲基丙烯酸缩水甘油酯(GMA)改善其脆性,提高氧化硅薄膜阻隔性能和柔韧性能的研究。通过无机氧化硅层和有机GMA层交叠沉积来研究不同沉积参数对薄膜的阻隔性能影响。红外光谱(FTIR)分析在1030 cm-1和1730 cm-1处出现硅氧和羰基特征峰表明沉积薄膜为氧化硅和GMA。通过透氧性能测试(OTR)表明,沉积薄膜叠合顺序为氧化硅/GMA/氧化硅并且叠合六层时阻氧性最好,OTR为0.125(mL/m2.24 h)(原膜为130(mL/m2.24 h))。表面形貌分析表明薄膜由表面粗糙度较高的氧化硅层和粗糙度较低的有机GMA混合叠加在一起,并进一步从表面形貌角度说明三层叠合时,薄膜OTR较好的原因。按照GB/T 10004-1998标准,采用CPP为内封层,湿式复合工艺实验表明,复合薄膜的热封层良好、机械性能好。
The plasma chemical polymerization of silicon oxide layer on the surface of a single layer of glycidyl methacrylate (GMA) to improve its brittleness, improve the barrier properties of silicon oxide films and flexible properties. The effects of different deposition parameters on the barrier properties of the films were investigated by overlapping deposition of inorganic and organic GMA layers. FTIR analysis of silicon and carbonyl peaks at 1030 cm-1 and 1730 cm-1 indicates that the deposited films are silica and GMA. Oxygen permeability test (OTR) showed that the deposition sequence of the deposited films was silicon oxide / GMA / silicon oxide and the best oxygen barrier property was obtained when the six layers were laminated. The OTR was 0.125 (mL / m2.24 h) 130 (mL / m2.24 h)). Surface topography analysis shows that the film is composed of a mixture of silicon oxide with higher surface roughness and organic GMA with lower roughness, and the better reason of the OTR of the film when the three layers are laminated is further illustrated from the surface topography. In accordance with GB / T 10004-1998 standards, the use of CPP as the inner seal, wet composite process experiments show that the heat seal layer of the composite film is good, good mechanical properties.