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1979年英国的N.E.W.Hartley采用注入CO~+的方式注碳,经CO~+注入的工具插件 (4Ni1Cr)和拉丝模(WC—6％CO),获得了磨损降低、寿命延长的好效果。1976年英国的I·H·Willson和1978年苏联的I.M.Belii曾分别报道用N~+注入Ti膜成功地合成了TiN,并对其电性能进行了系统研究。1981年中国台湾的P.A.Chen和T.T.Yang也用N~+轰击沉积在Si片上的1200A厚的Ti膜,成功地合成了化合物TiN,并用RBS和X-ray衍射对合成的化合物进行了鉴定。本实验采用CO~+注入高速钢,N~+注入高速钢表面镀Ti样品,与常规的N~+注入及空白样品进行对比,对注入后表面硬度和耐磨性的变化、注入层的成份、组织结构等进行了研究。实验结果表明,这两种注入工艺获得了比N~+注入更佳的效果。
In 1979, N.E.W.Hartley of the United Kingdom injected carbon into CO +, injected the tool plug (4Ni1Cr) and drawing die (WC-6% CO) with CO ~ + to obtain the good effect of reducing the wear and prolonging the service life. In 1976, I. H Willson in England and I.M.Belii in the Soviet Union in 1978 reported the successful synthesis of TiN by N ~ + implantation into Ti film, respectively. The electrical properties of TiN were systematically studied. In 1981, P.A.Chen and T.T.Yang of Taiwan of China also bombarded the 1200A Ti film deposited on the Si wafer with N +. The compound TiN was successfully synthesized and the synthesized compounds were identified by RBS and X-ray diffraction. In this experiment, CO ~ + was injected into high-speed steel, and Ti-plated samples of high-speed steel were implanted with N ~ +. Compared with conventional N ~ + implants and blank samples, the surface hardness and wear- , Organizational structure, etc. have been studied. The experimental results show that these two implantation processes achieve better results than N ~ + implantation.