随着科学技术的飞速发展,对于密封式无油真空泵的需要显得日趋迫切。如对高纯气体的传输、原子能工业气体的密封储存、半导体电子器件生产中稀有气体的回收、高绝缘变电设备中六氟化硫和易燃易爆氢气的传输、电子工业中无油清洁系统、大型高真空系统的预抽装置、粮食的低压输氮保粮等。 With the rapid development of science and technology, the need for sealed oil-free vacuum pumps becomes more and more urgent. Such as transmission of high-purity gases, sealed storage of atomic energy industrial gases, recovery of rare gases in the production of semiconductor electronic devices, transmission of sulfur hexafluoride and flammable and explosive hydrogen in high-insulation power transformation equipment, and oil-free cleaning in the electronics industry. Systems, pre-extraction devices for large high-vacuum systems, low-pressure nitrogen crops for grain, etc.