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本文介绍了一种可以测量局部等离子体电子密度的微波共振探针法,并给出了它的测量原理、设计方法和实验结果。实验结果表明:由于微波共振探针不受鞘层的影响,因此它比通常的朗谬静电探针对等离子体密度的测量要精确得多。微波共振探针的空间分辨率与它的几何尺寸有关。
This paper introduces a microwave resonance probe method that can measure the local plasma electron density, and gives its measuring principle, design method and experimental results. The experimental results show that the microwave resonant probe is much more accurate than the conventional Langmuir electrostatic probe in measuring plasma density because it is unaffected by the sheath. The spatial resolution of a microwave resonance probe is related to its geometry.