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多离子束混合材料表面改性技术有比离子镀和离子注入方法优越之处。本文研究了高速钢(W18Cr4V)表面多离子束混合沉积 Ti-N 膜的横截面组织,结果表明,从基体至镀膜顶端共有5个层次的组织。在基体表面有一层约20nm 厚的 Ti-Fe 非晶合金层,非晶层外是层状 Ti_2N 组织,极细纤维状Ti_2N 组织,极细纤维状、略有粗化的纤维状以及细柱状的 Ti_2N 和 TiN 组织,最外层是细柱状的 TiN 组织。高速钢基体表面晶粒明显细化,且有约100nm 左右深度的 Ti-N-Fe 及其它基体元素的混合区。探讨了膜层形成机理及对性能影响。
Multi-ion beam surface modification of hybrid materials than ion plating and ion implantation methods superiority. In this paper, the cross-sectional structure of Ti-N films deposited by multi-ion beam deposition on high speed steel (W18Cr4V) was studied. The results show that there are 5 layers of microstructure from the substrate to the top of the coating. On the surface of the substrate is a layer of about 20nm thick Ti-Fe amorphous alloy layer outside the amorphous layer is layered Ti_2N organization, very fine fibrous Ti_2N organization, very fine fibrous, slightly roughened fibrous and fine columnar Ti_2N and TiN, the outermost layer is thin columnar TiN. High-speed steel substrate surface grain refinement, and about 100nm depth of Ti-N-Fe and other matrix elements of the mixing zone. The film formation mechanism and its influence on the performance were discussed.