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相位扫描干涉度量术的广泛应用推动了去包裹算法的发展。在多种算法中,用于数字光学轮廓仪的相位去包裹算法必须具有较高的普遍适用性,而且必须兼顾健壮性与效率。本文对传统算法和最小二乘算法这两种典型去包裹算法进行了比较研究,并在自行研制的数字光学轮廓仪上进行了验证。
The widespread use of phase-scan interferometry promotes the development of the package-wrapping algorithm. In many algorithms, the phase unwrapping algorithm used for digital optical profilometers must have high universal applicability and must combine robustness and efficiency. In this paper, the traditional algorithms and the least squares algorithm are compared and studied, and the typical optical deconvolution tools are validated.