前言采用闭循环低温致冷机冷却的小型低温泵曾在1977年介绍过,它已广泛地应应用于半导体工业以及需要小型而清洁的高真空泵的研究部门中。目前,最常用的低温泵的抽气口径约为193～295毫米。随着使用量的增加,已在大型研究容器和某些工业应用,如像冶金容器的抽气系统中,对犬尺寸低温泵的兴趣就越来越大。 INTRODUCTION A small cryogenic pump cooled by a closed loop cryogenic refrigerator was introduced in 1977 and has been used extensively in the semiconductor industry and in research departments that require small and clean high vacuum pumps. At present, the most commonly used cryogenic pump suction diameter of about 193 ~ 295 mm. As usage has increased, interest has been growing in dog-sized cryogenic pumps in large research vessels and in certain industrial applications, such as exhaust systems for metallurgical vessels.