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在信息化进程中,随着摩尔定律越来越接近极限,将微电子和光电子结合起来,开发硅基大规模光电子集成技术已经成为技术发展的必然和业界的普遍共识.在硅基光电子集成器件中,硅基光源是重中之重.虽然硅是间接带隙半导体材料,发光效率很低,但人们一直没有放弃制备硅基光源.硅基光源包括硅基光波导放大器、发光二极管、激光器等,其中硅基光波导放大器又是激光器的基础,是硅基光电子集成回路中不可或缺的器件,如果光波导放大器有足够高的净增益,在光波导放大器的两端设计合适的谐振腔就可以获得光泵的激光.本文着眼于硅基光波导放大器,介绍了目前硅基光波导放大器最主要的两个研究方向,即硅基混合集成Ⅲ- Ⅴ族半导体光波导放大器和硅基掺稀土离子光波导放大器.并分别讨论了这两个研究方向的原理、制备方法、发展过程等,列举了相关的典型研究成果,最后简单介绍了其他光放大技术,并做了相应的分析、总结和展望.
In the process of informationization, as Moore’s Law gets closer and closer to the limit, the integration of microelectronics and optoelectronics, the development of large-scale silicon-based optoelectronic integrated technology has become the inevitable development of technology and industry consensus .In silicon-based optoelectronic integrated devices , Silicon-based light source is the most important.Although silicon is an indirect bandgap semiconductor material, low luminous efficiency, but people have not given up the preparation of silicon-based light source.Silicon-based light sources, including silicon-based optical waveguide amplifiers, light-emitting diodes, lasers, etc. , Which is based on silicon-based optical waveguide amplifier laser is an integral silicon-based optoelectronic integrated circuit device, if the optical waveguide amplifier has a sufficiently high net gain at both ends of the optical waveguide amplifier design of the appropriate cavity You can get the optical pump laser.This paper focuses on the silicon-based optical waveguide amplifier, introduces the current two of the most important research directions of the silicon-based optical waveguide amplifier, that is, silicon-based hybrid integrated III-V semiconductor optical waveguide amplifier and silicon-based rare earth Ion optical waveguide amplifier, and discussed the principle of these two research directions, preparation methods, development process, etc., cited the relevant Type of research, and finally a brief introduction of other optical amplification technology, and make the appropriate analysis, summary and outlook.