基于微流控芯片的微型气相色谱柱可实现对微量恶臭气体的快速有效检测。给出了微流控芯片上微型气相色谱柱的检测机理和实验数据。该芯片利用喷砂加工技术在尺寸为115 mm×60 mm×6 mm硼硅酸玻璃晶圆上加工出半圆截面的S形微通道,再用热键合技术将具有同样沟槽的两基片对接,得到内径为1 mm的圆形截面沟槽,沟槽有效长度为1.8 m。根据恶臭气体的性质,在沟槽表面涂敷聚乙二醇作为固定相。所开发的芯片对丙酮气体的检测要优于不锈钢色谱柱。利用该芯片进一步对丙酮和乙醇混合气体进行分离实验,分离度可达3.1,分离性能良好。 Microfluidic chips based on the micro-GC column can achieve rapid and effective detection of trace amounts of malodorous gases. The detection mechanism and experimental data of micro GC columns on microfluidic chips are given. The chip uses sandblasting technology in the size of 115 mm × 60 mm × 6 mm borosilicate glass wafer processed semicircular cross-section of the S-shaped microchannels, and then use the thermal bonding technology will have the same groove of the two substrates Butt joint to obtain a circular cross-section groove with an inner diameter of 1 mm, the effective length of the groove is 1.8 m. Depending on the nature of the malodorous gas, polyethylene glycol is applied as a stationary phase on the surface of the groove. The developed chip is superior to stainless steel in the detection of acetone gas. The chip was further used to separate the mixed gas of acetone and ethanol, the resolution was up to 3.1 and the separation performance was good.