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通过推导高斯光条件下像散离焦检测系统中离焦量与聚焦误差信号功率之间的关系,分析了激光光斑能量中心相对四象限探测器几何中心的偏移距离和偏移角对离焦量测量精度的影响及其规律。在此基础上,提出了一种易于实现、能够精确定位四象限探测器的实验方法,该方法能够有效地提升系统抗干扰能力和探测精度,减小系统误差,加强系统稳定性。此过程对设计搭建高精度像散离焦检测系统具有重要的指导意义。
By deducing the relation between the defocus amount and the power of the focus error signal in the astigmatism defocus detection system under the condition of Gaussian light, the offset distance and offset angle between the energy center of the laser spot and the geometrical center of the four-quadrant detector are analyzed. Influence of Measurement Accuracy and Its Law. On this basis, an experiment method that is easy to implement and capable of pinpointing a four-quadrant detector is proposed. This method can effectively improve the system’s anti-interference ability and detection accuracy, reduce system errors and enhance system stability. This process has an important guiding significance for the design and construction of a high-precision astigmatism defocus detection system.