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在分析四象限位置敏感器件(4Q-PSD)结构及特点的基础上,利用该器件作为核心探测器,设计了一种光电探测系统,对高分辨率横向位移的探测进行了研究。系统主要包括LED光发射、光接收、信号处理和显示等部分。LED发射的光束经聚焦透镜汇聚后射向反射镜,反射光聚焦到一个4Q-PSD上,经线性化的信号处理电路处理后,可实现高分辨率横向位移的测量。实验证明:横向位移测量稳定性与精度与测量距离无关,系统的误差主要来自反射镜反射的非均匀性。
Based on the analysis of the structure and characteristics of 4Q-PSD, the photodetection system is designed by using this device as the core detector. The detection of high-resolution horizontal displacement is studied. System includes LED light emission, light reception, signal processing and display and other parts. The beam emitted by the LED is focused by the focusing lens and then emitted to the mirror. The reflected light is focused on a 4Q-PSD. After being processed by the linearized signal processing circuit, the high-resolution horizontal displacement measurement can be realized. Experiments show that: the stability and accuracy of lateral displacement measurement has nothing to do with the measurement distance, the system error mainly comes from the non-uniform reflection of the mirror.