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为了建立质量保证体系,微米和纳米样板至今仍被广泛地应用于校准微纳米尺度的测量仪器中．介绍了应用由德国联邦物理研究所开发研究的、测量范围为25 mm×25 mm×5 mm的计量型扫描力显微镜(M-LRSFM)的校准方法．上述计量型扫描力显微镜配置有三个零拍的激光干涉仪,可分别测量沿x、y、z三条轴线方向的位移,因而其测量值可直接溯源于“米”定义．此种M-LRSFM能够校准横向的微纳尺度的结构尺寸,诸如阶梯高度、一维和二维光栅、镀层厚度、线宽、微纳尺度的表面粗糙度等．作为实例,介绍了一种横向样板的校准程序及获得的校准结果．研究表明这种方法适合于校验扫描电子显微镜(SEM)的放大倍率．
In order to establish a quality assurance system, micro and nano samples are still widely used to calibrate micro and nano-scale measuring instruments. The calibration method using a scanning force microscope (M-LRSFM) measuring 25 mm × 25 mm × 5 mm developed by the Federal Institute of Physics in Germany is presented. The above measuring scanning microscope is equipped with three zero-beat laser interferometers that measure the displacements in the x, y, and z axes, respectively, so that their measurements can be traced directly to the “meter” definition. Such M-LRSFM can calibrate the lateral micro-scale structure size, such as the height of the ladder, one-dimensional and two-dimensional grating, coating thickness, line width, micro-nano scale surface roughness. As an example, a horizontal calibration procedure and the calibration results obtained are introduced. Research shows that this method is suitable for verifying the magnification of scanning electron microscopy (SEM).