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采用固相反应法将五水硝酸铟(In(NO3)3·5H2O)、硝酸银(AgNO3)混合作为前驱体,在室温下研磨反应得到混合物颗粒,在600℃的温度下煅烧2h,可得银掺杂的In2O3的纳米颗粒,然后组装成气敏传感器。利用X-射线衍射仪(XRD)、扫描电子显微镜(SEM)、X-射线光电子能谱仪(XPS)、气敏测试系统(WS-30A)对薄膜进行表征及气敏性能测试。结果表明,制备的银掺杂In2O3的纳米颗粒直径约为80nm,银颗粒在煅烧过程中已经渗透进立方晶型的In2O3晶格中。相比较纯的In2O3传感器,银掺杂后的In2O3传感器对乙醇显示了更高的灵敏度、更高的选择性以及理想的工作温度。对银掺杂的含量、乙醇蒸汽的浓度以及工作温度对气敏性能的影响进行了分析,发现10%mol含量的银掺杂试样在150℃的温度下,对乙醇蒸汽呈现出了最大的灵敏度与最高的选择性。也讨论了银掺杂对InO的气敏性能的影响。
Solid phase reaction method was used to mix the indium nitrate pentahydrate (In (NO3) 3 · 5H2O) and silver nitrate (AgNO3) as precursors to obtain a mixture of particles by grinding reaction at room temperature and calcination at a temperature of 600 DEG C for 2h, Silver-doped In 2 O 3 nanoparticles and then assembled into gas sensors. The films were characterized and tested for gas sensitivity using X-ray diffraction (XRD), scanning electron microscopy (SEM), X-ray photoelectron spectroscopy (XPS) and gas sensing system (WS-30A) The results show that the prepared silver-doped In 2 O 3 nanoparticles have a diameter of about 80 nm and the silver particles have infiltrated into the cubic In 2 O 3 lattice during calcination. Compared with the pure In2O3 sensor, the silver-doped In2O3 sensor shows higher sensitivity, higher selectivity and ideal working temperature to ethanol. The influence of silver doping content, ethanol vapor concentration and operating temperature on gas sensing properties was analyzed. It was found that the 10% mol content of silver-doped samples showed the maximum of ethanol vapor at 150 ℃ Sensitivity and highest selectivity. The effect of silver doping on the gas sensing properties of InO is also discussed.