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利用改进试验装置 ,及在简单盐溶液中加入添加剂的方法 ,电沉积制备出 Ga As薄膜。扫描电镜和 X射线衍射仪测试结果表明 ,薄膜成分更接近化学计量比 1∶ 1,各次试验数值分散性小 ,厚薄均匀。
The GaAs thin film was electrodeposited using an improved test setup and the addition of additives in a simple salt solution. Scanning electron microscopy and X-ray diffraction test results show that the film composition closer to the stoichiometric ratio of 1: 1, the value of each test dispersion is small, uniform thickness.