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熔石英光学材料是一种高新技术产品,在现代各领域的应用越来越广泛,特别是航天航空等领域具有大量应用需求。由于其产品的制造难度较大,因此其成品质量的高低就成为人们最为关注的问题,其中尤以亚表层损伤的问题至关重要。论述了几种常用的亚表层损伤检测方法和原理,分析了其优缺点。在此基础上说明了使用荧光共聚焦显微技术来检测光学元件亚表层损伤的可行性和准确性。使用共聚焦激光扫描显微镜对熔石英玻璃试件的亚表层损伤进行了检测实验。对比了角度抛光法所得到的两种荧光量子点亚表层损伤深度,可以明确在一定的加工条件下亚表层损伤的分布情况。使用图像处理软件Image-Pro Plus 6.0分析了亚表层损伤的分布图像及分布密度,定量的给出了亚表层损伤的基本规律。
Fused silica optical material is a kind of high-tech product, which has been widely used in all fields of modern times. In particular, it has a large number of application requirements in fields such as aerospace and aviation. Due to the difficulty of manufacturing their products, the quality of their finished products has become the most concern. Among them, the problem of sub-surface damage is of crucial importance. Several common sub-surface damage detection methods and principles are discussed, and their advantages and disadvantages are analyzed. On this basis, the feasibility and accuracy of fluorescence microscopy to detect sub-surface damage of optical components were demonstrated. The confocal laser scanning microscope was used to test the sub-surface damage of fused silica glass. Contrasting the depth of subsurface damage of the two kinds of fluorescence quantum dots obtained by the angle polishing method, the distribution of the sub-surface damage under certain processing conditions can be clarified. The image and distribution density of sub-surface damage were analyzed using Image-Pro Plus 6.0 software. The basic rules of sub-surface damage were given quantitatively.