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用能量为2.0 MeV剂量为2×10~(16) ion/cm~2 He~+离子室温下注入到z切的氧化锌晶体中形成光波导。退火前后用棱镜耦合法在633 nm激光波长下测量波导的暗模特性,发现在空气中经过适当退火后暗模消失,说明晶格损伤减少,进一步的退火处理有可能使晶格损伤完全恢复。用TRIM’2003程序模拟了2.0 MeV He+离子注入到氧化锌晶体的过程,得到氧化锌损伤分布与穿透深度的关系曲线,并利用反射计算法重构了离子注入波导的折射率分布,发现在波导区折射率增加,在离子射程的末端有一个折射率降低的光学位垒,结果还显示折射率分布曲线与损伤分布曲线非常相似,这充分说明核碰撞所造成的晶格损伤是形成光波导的主要原因。
An optical waveguide was formed by injecting into a z-cut zinc oxide crystal at an energy of 2.0 MeV at a dose of 2 × 10 ~ (16) ions / cm ~ 2 He ~ + ions at room temperature. Before and after annealing, the dark mode characteristics of the waveguide were measured by the prism coupling method at a wavelength of 633 nm. It was found that the dark mode disappeared after appropriate annealing in the air, indicating that the lattice damage was reduced. Further annealing treatment may completely restore the lattice damage. The procedure of TRIM’2003 was used to simulate the injection of 2.0 MeV He + ions into zinc oxide crystal. The relationship between the damage distribution and the penetration depth of zinc oxide was obtained. The refractive index distribution of ion implantation waveguide was reconstructed by reflection calculation. The refractive index of the waveguide increases with an optical barrier with reduced refractive index at the end of the ion range. The results also show that the refractive index distribution curve is very similar to the damage distribution curve, which fully shows that the lattice damage caused by the nuclear collision is the formation of the optical waveguide The main reason.