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本文分析讨论了薄膜电阻传感器■值的电脉冲标定技术及其标定关系式。着重探讨了引起■值测量误差的各种因素,找到了提高标定精度的一些途径和方法。本文解决了文献[3]提出的一个难点,即低标定温升会引起△V～t曲线的信噪比变坏,以致限制了标定精度的进一步提高。由于这一问题的解决,提高了信噪比,获得了低标定温升下的光滑曲线,再加以其它措施,使传感器■值的标定精度可达到±5%以内。
This paper analyzes and discusses the electropulsing calibration technique of the film resistance sensor and its calibration relationship. This paper focuses on the various factors that cause the error of the value measurement and finds some ways and methods to improve the calibration accuracy. This paper solves a difficult problem proposed in [3] that low calibration temperature rise will lead to the deterioration of signal-to-noise ratio of △ Vt curve, so as to limit the further improvement of calibration accuracy. As a result of this problem, the signal-to-noise ratio has been improved and a smooth curve with a low calibration temperature rise has been obtained. In addition, other measures can be taken to calibrate the sensor ■ value within ± 5%.