以乙炔气为反应气体 ,采用催化裂解方法 ,在沉积有铁催化剂膜的单晶硅基体上研究碳纳米管薄膜的制备。研究表明 ,由于催化剂的作用 ,在硅基体上能够形成直径为 5 0～ 10 0nm的碳纳米管 ;铁催化剂膜的粒径大小和分散状态对碳钠米管薄膜的厚度、管径和均匀性起着关键作用 ;氢氟酸水溶液处理的催化剂膜有利于铁催化剂颗粒的分散和均匀化 ,能形成比较好的碳纳米管薄膜。由电镜分析发现 ,在单晶硅基体上生长的碳纳米管为顶端生长模式 The acetylene gas is used as the reaction gas, and the preparation of the carbon nanotube thin film is studied on the single crystal silicon substrate deposited with the iron catalyst film by a catalytic cracking method. The results show that due to the effect of the catalyst, the carbon nanotubes with diameter of 50 ~ 100 nm can be formed on the silicon substrate; the thickness, diameter and uniformity Plays a key role; Hydrofluoric acid treated catalyst membrane is conducive to the dispersion and homogenization of iron catalyst particles, can form better carbon nanotube film. Electron microscopy analysis showed that the growth of carbon nanotubes on the monocrystalline silicon substrate was the top growth mode