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本文研究了在微波等离子体ＣＶＤ系统中，金刚石在Ｃ６０蒸发膜表面的成核行为，观察到金刚石晶核聚集现象，并且讨论了这种成核行为的产生机理。
In this paper, the nucleation behavior of diamond on the surface of C60 evaporated film in microwave plasma CVD system is studied. The diamond nucleation phenomenon is observed and the mechanism of nucleation is discussed.