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本文介绍了一种新型的光寻址生物和化学图象传感器的基本原理、结构及特点 ,并着重介绍了我们开发研制的生物化学图象传感器和有关的测试实验结果。完成了半导体硅器件的制作、生物化学敏感膜的制备、以激光器为主的光学扫描和机械定位系统以及基于微机系统的测量控制系统的设计制作。该传感器可以检测不同的生物和化学物质的静态及动态响应图象。实验结果表明 :该光寻址生物化学传感器系统具有较高灵敏度和分辨率以及较好的光寻址成象能力。利用该传感器可望开发出新一代的集成生物化学图象传感器。
This paper introduces the basic principle, structure and characteristics of a new kind of optical addressing biological and chemical image sensor, and emphatically introduces the biochemical image sensor we developed and the related experimental results. Completed the production of semiconductor silicon devices, the preparation of biochemical sensitive film, the laser-based optical scanning and mechanical positioning systems and computer-based measurement control system design and production. The sensor can detect static and dynamic response images of different biological and chemical substances. The experimental results show that the optical addressing biochemical sensor system has higher sensitivity and resolution and better optical addressing imaging ability. The sensor is expected to develop a new generation of integrated biochemical image sensor.